MicroProbe, a venture-backed developer of semiconductor systems-on-a-chip wafer test equipment that has offices in Carlsbad, has been acquired by FormFactor, FormFactor said today. FormFactor said it paid $100M in cash and $16.8M in stock for Astria Semiconductor Holdings Inc, the parent company of MicroProbe. Astria/MicroProbe was venture backed by Flywheel Ventures, Gemini Investors, and Intel Capital. FormFactor said that MicroProbe had $87.3M in revenue in its fiscal year ended December 31, 2011, and has approximately 360 employees worldwide.